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集散控制系統(tǒng)（Distributed Control System－DCS）集計(jì)算機(jī)技術(shù)、控制技術(shù)、通信技術(shù)、CRT技術(shù)于一體，廣泛應(yīng)用于生產(chǎn)過程控制系統(tǒng)。隨著計(jì)算機(jī)和網(wǎng)絡(luò)技術(shù)的飛速發(fā)展，產(chǎn)生了一種新型的控制系統(tǒng)———現(xiàn)場總線控制系統(tǒng)（Fieldbus Control System－FCS）。但國內(nèi)生產(chǎn)企業(yè)的情況是：大多數(shù)企業(yè)還處于模擬儀表和人工控制的階段，采用DCS控制系統(tǒng)的企業(yè)仍是少數(shù)。由于DCS應(yīng)用廣泛、技術(shù)成熟，在現(xiàn)有的技術(shù)條件和市場條件下，F(xiàn)CS還不能完全取代DCS，而且目前現(xiàn)場總線設(shè)備和系統(tǒng)還十分昂貴。因此，除了新建企業(yè)外，國內(nèi)企業(yè)在較長時(shí)間不可能全面采用現(xiàn)場總線技術(shù)，而必須走逐步發(fā)展、過渡的道路。 ??我們在上海石化股份公司環(huán)保部水質(zhì)凈化廠監(jiān)控系統(tǒng)的改造項(xiàng)目中，對3個生產(chǎn)單元已有的DCS和PLC進(jìn)行改造，增加通信功能，實(shí)現(xiàn)總調(diào)度室對各生產(chǎn)裝置的集中監(jiān)控。 2?系統(tǒng)改造方案?? 根據(jù)水質(zhì)凈化廠各生產(chǎn)單元的功能和建設(shè)階段，分為廠外調(diào)節(jié)池、污水一段、氧化溝、四期污水處理、污泥脫水、污泥干化6個生產(chǎn)單元。另外，在廠部設(shè)有總調(diào)度室，但是總調(diào)度室的監(jiān)控水平較為落后，改造之前基本上不能對各個生產(chǎn)單元進(jìn)行監(jiān)控。為了適應(yīng)生產(chǎn)需要，提高生產(chǎn)效率，改善操作條件，加強(qiáng)監(jiān)控手段，確保各生產(chǎn)裝置的正常運(yùn)行，急需對各生產(chǎn)單元和總調(diào)度室進(jìn)行技術(shù)和設(shè)備的更新改造，從而能在總調(diào)度室對各裝置進(jìn)行監(jiān)視管理，及時(shí)了解各裝置的運(yùn)行情況，達(dá)到指揮及時(shí)和調(diào)度準(zhǔn)確的目的。 2．1?現(xiàn)場監(jiān)控系統(tǒng)的改造 ??現(xiàn)場監(jiān)控系統(tǒng)的改造要充分利用原有儀表和設(shè)備，主要考慮可靠性和實(shí)時(shí)性。首先對自控程度較高的3個單元進(jìn)行改造（系統(tǒng)結(jié)構(gòu)見圖2—1）： ??四期污水處理生產(chǎn)單元控制設(shè)備配置了兩套ALLEN－BRADELY公司PLC設(shè)備。25塊開關(guān)量輸入信號卡，可采集384點(diǎn)信號；7塊開關(guān)量輸出信號卡，可輸出112點(diǎn)信號；3塊模擬量輸入信號卡，可采集24點(diǎn)信號。兩套AB—PLC通過DH＋（數(shù)據(jù)高速通道）實(shí)現(xiàn)數(shù)據(jù)共享。在原有的現(xiàn)場控制計(jì)算機(jī)上分別增加以太網(wǎng)卡，通過以太網(wǎng)將實(shí)時(shí)數(shù)據(jù)送到總調(diào)度室處理。??輸出192點(diǎn)信號；1塊模擬量輸入信號卡，可采集8點(diǎn)信號。系統(tǒng)運(yùn)行采用遙控開關(guān)操作與全模擬流程盤顯示。在原有的Siemens S5－115UPLC上增加RS－232通訊模塊（CP524）和1臺現(xiàn)場操作站，用點(diǎn)對點(diǎn)方法連接，使PLC的數(shù)據(jù)通過現(xiàn)場操作站送到以太網(wǎng)上，與總調(diào)度室監(jiān)控計(jì)算機(jī)通信。但RS－232傳輸速率只有9600bps，操作站僅對現(xiàn)場起到監(jiān)視作用。
T37 TYLAN GENERAL PR TRANSD LRC: 771-061941-015 0-1000 TORR CDLD-31S06-EMC14842 APPLIED MATERIALS HOSE ASSY TFE/SST-BRAID 5/16IDX9.25L S 3400-00002
14841 APPLIED MATERIALS HOSE ASSY TFE/SST-BRAID 5/16IDX12"L SEA 3400-00003
16506 SMC 2 SLOTS PNEU MANF W SOLENOID VLV 02-147128-00 17-146883-00 US8187-4
19287 DAIFUKU RM/TFE/CONV.MAINTENANCE UNIT CONTROLLER, 7A00981HA2 AGH8AA11
19755 APPLIED MATERIALS SCR PN HD 6-32 X.44 HAST 0020-30895
14450 APPLIED MATERIALS HOSE ASSY FLEX BRAID 1/4IDX23.5L 1/4VC, 2FT 3400-01134
14906 WASCO VACUUM SWITCH, 30"HG, 1A, 115 VAC SV129-31S3C/7774
15266 ORIENTAL MOTOR PCB, 5-PHASE DRIVER, EB2276-4G, EB2277-4G A4509-048
16599 PISCO 10 SLOT VACUUM GEN ASSY W/FVUS011-NA VKMH05W-S5/3253/8S2G-B10-NA-VBS
17514 SMC 8 SLOTS VLV MANF + VLVS W/ VACUUM SWITCH ZSE3-0X-21 VJ324M & VJ314
7330 IFM SMARTLINK DP PROFIBUS AC1375
157 ASML PCB POWER SUPPLY INTERFACE 4022.436.1609
21750 ORIENTAL MOTOR VEXTA 2-PHASE STEPPING MOTOR W/ BALL SCREW C9337-9212KM
6138 CELERITY MFC IN3XP MASSS FLOW CONTROLLER BBYLUA002
6570 BROOKS MASS FLOW CONTROLLER, GAS: AR, 300 SCCM GF120CXXO
10943 APPLIED MATERIALS ASSY, SLIT VALVE, METAL ETCH, VITON 0010-70615
5453 ECI TECHNOLOGY PSD/3 SYRINGE PUMP, VALVE LU0970
20580 EMI PCB ASSY, SUNG WEI 11620-01P-707(E1) 098-11620-00
20961 OMRON PCB, TEMPERATURE CONTROLLER, 3385804-8C E5ZT-N08TC01
20913 APPLIED MATERIALS HARNESS ASSY, DR 11-12-13-14 MTR ENC 0140-70601
20910 APPLIED MATERIALS HARNESS ASSY LL MOTION SV I/O PRODR XP 0140-62711
14130 MDC SYNCHRONOUS STEPPING MOTOR, 670000 BRM-133
18685 APPLIED MATERIALS HEATER JACKET SLEEVE 1410-02438
18684 APPLIED MATERIALS HEATER JACKET SLEEVE 1410-02437
19922 FUJIKOKI PRESSURE SWITCH VDP 20TF
18683 APPLIED MATERIALS HEATER JACKET SLEEVE 1410-02418
19147 ADVANCED DELIVERY & CHEMICAL SYSTEM PCB ASSY 969
8230 DAINIPPON SCREEN FILTER BOX ASSY 2VC48054
7961 INTEGRATED DYNAMICS ENGINEERING PREAMP FOR MAXCON 1000 871006-03
2696 TDK CORPORATION POWER SUPPLY, 100-240V 0.8-0.4A 50-60HZ RKW05-10RC
9244 BIMBA ROTARY CYLINDER PT-074180
12019 KOGANEI ELEAVE ELECTRIC HAND W/ EWHC-NH NHB5749 & ACCS. EWHA12A-C-5L
13233 TEXAS INSTRUMENTS PCB, READER SYS CTRL MOD W/RI-STU-MB6A-03 RI-CTL-MB6A-03
44 TOKYO ELECTRON PCB, TTLA08-13 F-MFC_AI_4, 3880-200122-11 3895-120917-11
6039 HORIBA-STEC MFC Z500 SEC-Z522KX
4987 APPLIED MATERIALS HINGE, GENERATOR RACK, PRODUCER SE 0015-01466
661 CONTROLAIR INC I/P TRANSDUCER ELECTROPNEUMATIC TYPE 500X 500-AH
12077 ELMOTEC CONTROLLER LVMS 4800R2
14888 APPLIED MATERIALS I/O BLOCK, 300MM MAINFRAME DEVICE NET, DIP294 0190-13220
16900 APPLIED MATERIALS MOD PWR DRIVER CONTROL MA-CH 0150-08273
14084 TOKYO ELECTRON PCB, TOUCH SENSOR II, 1208-001167-11 1281-001167-1
19516 DIGITAL DYNAMICS PCB ASSY, SIO/SSIOC I/O VER2 005943-B
10534 SMC SI UNIT 16-PORT PNEUMATIC MANIFOLD (IN50310) IN503-09
2716 DIGITAL POWER CORP POWER SUPPLY US250-124
16706 APPLIED MATERIALS HARN ASSY, ENCODERANDHOME SENSOR DRIVER, D 0140-76929
15220 LAM RESEARCH WELDMENT DUAL GAS INJECT 2300 839-016784-002
4173 SIEGER ELECTROCHEMICAL TRANSMITTER SERIES 2000 02000-A-2134
10503 COGNEX IS5413-00 SMART CAMERA W/ PENTAX LENS 800-5830-4R A
973 SWAGELOK FLEXIBLE METAL HOSE SS-FM8RM8RF8-48
9721 SEW EURODRIVE BRAKING RESISTOR (826 269 1) (BW 100-005) 802 272 0
9112 LAM RESEARCH KLA-TENCOR VIDEO FRONT END 2 ES20XP 740-613212-000
11273 IWAKI METERING PUMP EH-E56VC-20EPE5
17550 BANNER WORLD-BEAM MINIATURE SELF-CONTAINED SNSR Q12AB6FF30
22056 AMETEK STEPPER LINEAR ACTUATOR E35H4J-2.33-A04
9030 VARIAN JUNCTION BOX CHT-100 FY102-10100B
268 LAM RESEARCH PCB, EDGE DETECTOR BREAKOUT BOARD 810-17071-001
19562 LAM RESEARCH BAFFLE PLATE 8'' 715-011913-083-H-1011232-AUK-15-132-0835
21766 NIDEC SERVO STEPPER MOTOR W/ ENCODER RENCO-R35I KH56KM2B082
21811 YASKAWA ELECTRIC AC SERVO MOTOR W/O ENCODER COVER SGM-01U3B4L
21804 FAULHABER DC SERVO MOTOR W/ MINIMOTOR 23/1 66:1, P/N: 942193 2842S012C
12810 CTI CRYOLINE PRESSURIZED STAINLESS STEEL HOSE,10FT LONG 8043074
8646 OMRON PANEL METER K3NX-VD1A-T1
7528 TOKYO ELECTRON ELECTRODE BOTTOM, P/C (85P-ESC-NW2-UP) ES1885-023137-17
12091 MITSUBISHI 3 PHASE AC SERVO MOTOR, 106V, 100W, 3000R/MIN HF-KP13
19384 VIPA DIGITAL INPUT MOUDLE, DI 16XDC24V VIPA 221-1BH10
9666 CTI CRYO-FLEX HELIUM LINE/HOST, 14' 3/4" 8043086G168
10322 RKC REX-C100 TEMPERATURE CONTROLLER C100FK02-V*GN
1430 PULNIX COMPACT MONOCHROME CAMERA TM-7CN
18419 LOVE CONTROLS CORP SELF TUNE PLUS TEMPERATURE CONTROLLER 16111
1236 JVC 1/2 DIGITAL CCD CAMERA TK-C1381EG
10534 SMC SI UNIT 16-PORT PNEUMATIC MANIFOLD (IN50310) IN503-09
9001 EBARA ROUGH PUMP CABLE 140INCHES (9A82) A10S
15243 ROSS ENGINEERING DIGITAL VOLTMETER/AMPLIFIER VMD2A
10044 TELI CCD COLOR CAMERA W/ TAMRON LENS 1:1.6 (TK4498A5 01) CS5260DP
10254 ALLEN-BRADLEY FLEX I/O OUTPUT MODULE 4PNT ANALOG 12BIT(1794-ADN) 1794-OF41
12832 CTI-CRYOGENICS ON-BOARD WATERPUMP 8116340G001
12106 FESTO GUIDE UNIT FOR ISO CYLINDER, P/N: 33481 FEN-12/16-125-KF
12702 HP PCB, JET DIRECT PRINT/ETHERNET CARD 10BASE-T 5182-4752
5647 NIKON MICROSCOPE OBJECTIVE LENS BD PLAN 60/0.80 210/0
3518 DIAVAC LIMITED CCG & 2CH PIRANI GAUGE CONTROLLER PC-3DA
2162 LAMY NOSE LAMINATOR 220V 50/60HZ 240W I-LAMI-100
12962 ADIXEN ALCATEL SINGLE-CHANNEL GAUGE CONTROLLER, P/N: 112711 ACS2000
11478 BIRD LINE SECTION, RADIO 8890-050
5290 VERIFLO HIGH PURITY MANIFOLD VALVE P/N: 54012096 930Y2NC/NCSLSO7148
4721 YASKAWA AC SERVO MOTOR, 200V 750W 5.4A SGMAS-08ACA21
19161 THK LINEAR ACTUATOR KR26
21886 XYCARB CERAMICS 200MM, RNG, HTEDG, AMT, AFTMKT, QTZ 10682005
6026 AERA MFC FC-D985C MASS FLOW CONTROLLER TC FC-D985CY-BF
4020 LAM RESEARCH LOWER MATCHBOX CTLR (DC) 810-034802-001 853-480133-001-3999
10710 VERIFLO HIGH PURITY VALVE DIAPHRAGM, SPRING 45700041
11045 YASKAWA AC SERVO MOTOR, 3000RPM SGMAS-C2AGA-SU12
12921 TELEDYNE ISCO X-Y FRACTION COLLECTOR FOXY 200
11888 KOLLMORGEN DIGITAL SERVO AMPLIFIER, S3030 1-NA-SB
B187 MEGAWAVE ULTRASONIC GENERATOR ME-994P601CA21
7208 LEUZE LUMIFLEX COMPACT LIGHT CURTAIN RECEIVER CR30-750
7970 KEYENCE SAFETY LIGHT CURTAIN RECEIVER PJ-V20R
2097 ASML POWER SUPPLY SVG 4022.472.8841
21950 TESCOM PRESSURE REGULATOR, MAX 0.20 MPA/30 PSIG 12-1A11AADM6DM6Z
2809 COSEL POWER SUPPLY, AC100-240V 50-60HZ P15E-24
1911 MITSUBISHI MELSERVO AC SERVO MR-H20A
14115 TOKYO ELECTRON PCB ASSY, TAB218-1/ BTM2-LF 2L81-050040-11
21755 ORIENTAL MOTOR STEPPING MOTOR, 0.25DEG/STEP, DC 1.5A PKP223D15A-SG7.2
4083 NAGANO KEIKI SEKAKUSHO ELECTRONIC PRESSURE SWITCH (PRESSURE RANGE 0-3) CE10
15243 ROSS ENGINEERING DIGITAL VOLTMETER/AMPLIFIER VMD2A
8643 APPLIED MATERIALS 5000 CLEANROOM SLIT VALVE ''S'' 513 CHEMRAZ 0240-76507
6316 AERA MFC FC-PA785 MFC FC-PA785Y-BF
7798 LAM RESEARCH LONWORKS, VALVE CONTROL NODE 710-002895-001 810-002895-002
10480 EUTECH INSTRUMENTS WATERPROOF PORTABLE METER COND610
7848 DAINIPPON SCREEN ON/OFF MOTOR CONTROL BOX HEMK-001
5276 PACIFIC SCIENTIFIC POWERMAX II 1.8 DEGREE STEP MOTOR P21NSXC-LDN-M1-02
19161 THK LINEAR ACTUATOR KR26
21886 XYCARB CERAMICS 200MM, RNG, HTEDG, AMT, AFTMKT, QTZ 10682005
5150 LAM RESEARCH RF COUPLER ASSEMBLY 853-033766-004-B-288
12110 SIEMENS SIMATIC RF360T TRANSPONDER EPOXY-CARD 6GT2800-4AC00
2201 SWAGELOK 1/4 VCR PNEUMATIC SS DIAPHRAGM VALVE 6LV-DAFR4-P-AB
12921 TELEDYNE ISCO X-Y FRACTION COLLECTOR FOXY 200
7462 VAT BELLOWS MANUAL ANGLE VALVE, A-266085 26332-KA01-0002
7208 LEUZE LUMIFLEX COMPACT LIGHT CURTAIN RECEIVER CR30-750
6319 TYLAN MFC TYLAN 2950 SERIES FC-2950MOEP5
4173 SIEGER ELECTROCHEMICAL TRANSMITTER SERIES 2000 02000-A-2134
4742 BANNER MINI-SCREEN LIGHT CURTAIN CONTROL BOX ASSY MSCA-1
21950 TESCOM PRESSURE REGULATOR, MAX 0.20 MPA/30 PSIG 12-1A11AADM6DM6Z
11160 METTLER TOLEDO MBC CELL DROPPING POINT SYSTEM FP81HT
14115 TOKYO ELECTRON PCB ASSY, TAB218-1/ BTM2-LF 2L81-050040-11
10994 HARMONIC DRVIE SERVO ACTUATOR, P/N: 604280 PMA-14A-100-01-E500DO-B
21755 ORIENTAL MOTOR STEPPING MOTOR, 0.25DEG/STEP, DC 1.5A PKP223D15A-SG7.2
6123 APPLIED MATERIALS MFC TC FC-DN780CPBA MASS FLOW CONTROLLER 3030-13116
6126 APPLIED MATERIALS MFC TC FC-DN780CPBA MASS FLOW CONTROLLER 3030-13109
6125 APPLIED MATERIALS MFC TC FC-DN780CPBA MASS FLOW CONTROLLER 3030-13493
5202 RKC FAREX SR MINI SYSTEM OPL-A*1-CS9
6209 MILLIPORE MFC INTELLIFLOW DIGITAL FLOW CONTROLLERS FSDBE100CK00
197 OMRON INTELLIGENT SIGNAL PROCESSOR K3NX-VD2A-C2
12140 FESTO STANDARD CYLINDER, P/N: 163304 DNC-32-60-PPV-A
4180 NAGANO KEIKI PRESSURE SENSOR GC30-101
12488 VEXTA 5-PHASE STEPPING MOTOR A4484-9215KPGM
3296 METROHM PERISTALTIC PUMP 772
B190 DELVO DENSEI DC POWER SUPPLY CONTROLLER DLC1213-HEB
8584 TOKYO ELECTRON PCB ASSY TRANSFER DISTRIBUTION BOARD BB81-000009-18
11548 ALLEN-BRADLEY CONTROLLOGIX, DC INPUT 32PT 1756-IB32/A
9716 B&R 6 SLOT X20 I/O SYSTEM, PS9400, DI8371, PS2100, DO8322 X20 BC 0063
1911 MITSUBISHI MELSERVO AC SERVO MR-H20A
5620 ULVAC KIKO OILFREE SCROLL VACUUM PUMP DIS-251
6310 MYKROLIS MFC TYLAN SERIES 2950 FC-2950M0EP5
498 VEXTA 2 PHASE STEPPING MOTOR PH264-01B-C11
249 ASTECH RFPP AUTOMATIC MATCHING NETWORK POWER SUPPLY ATL-100RA
16114 MKS THROTTLE CONTROL VALVE 253B-13646
T199 MKS BARATRON PRESSURE TRANSDUCER 500 TORR 892B-26843
15428 HONEYWELL MINI-PEEPER ULTRAVIOLET SCANNER C7027A1072J
14151 INTEL PCB EURO CARD 56 TSOP 3VFF - SIRRETTA PB1245
207 APPLIED MATERIALS CLAMP, ROLLING SEAL, 300MM TITAN PROFILE 0020-22479
T114 MKS BARATRON ETCH MANOMETER, 1 TORR E29B-22205
14185 MICRO MO SINGLE AXIS INTELLIGENT DRIVE WITH MVP2001B02
R12 OMRON COMMUNICATION MODULE DRT1-232C2
23137 NEWPORT LASER DIODE DRIVER 501
15207 LEYBOLD INFICON TRANSPECTOR RESIDUAL GAS ANALYZER W/SENSOR HEAD TSP TH100
5373 PANASONIC SERVO DRIVER MSDA021A2A15
8654 APPLIED MATERIALS HIGH DEP RATE FACEPLATE TEOS 0040-95475
14138 CONDOR DC POWER SUPPLY, PCB 02-91051-0071
15075 XYCARB CERAMICS LAMP, INFRARED, 2000W LP 10335430
3919 MIKRO SONIC ULTRASONIC GENERATOR 3.8A/4.2A, P/N: 02145875 U0500PM
1430 PULNIX COMPACT MONOCHROME CAMERA TM-7CN
13589 TEXAS INSTRUMENTS PCB, TI-RFID BOARD RI-CPU-0001-03
1236 JVC 1/2 DIGITAL CCD CAMERA TK-C1381EG
2256 GASONICS LAMPTRAY, FOR GASONICS AURA 3010 3000 17327-01
691 TEKNIC SERVO MOTOR, P/N: 2100844 M-2348-103
21415 MALEMA SENSORS FLOW SWITCH, P/N: 645-095773-001 M-50-4-T-SS-I
9459 SIEMENS FM354 SERVO MOTOR MODULE 6ES7 354-1AH01-0AE0
10797 RFPP RF POWER CONTROLLER AMNPS-2A SE 1-0
9834 APPLIED MATERIALS 5000 CVD CONFIGURED CHMBR CHMBR 4400
17636 SEIKO SEIKI PCB, MULTIPLIER BOARD H600 P005Y008Z865-3A2
19067 SANYO DENKI DC SERVO MOTOR W/ ENCODER E401000C00B R406-151EL8
10044 TELI CCD COLOR CAMERA W/ TAMRON LENS 1:1.6 (TK4498A5 01) CS5260DP
16613 APPLIED MATERIALS CPLG WAVEGUIDE TUNER MANUAL 3750-01126
6191 FUJIKIN MFC FCS FCS-4WS-798-F50#F
6254 FUJIKIN MFC FCS FCS-4WS-798-F500#F
6036 FUJIKIN MFC FCS FCS-4WS-798-F100#F
6187 FUJIKIN MFC FCS FCS-4WS-798-F200#F
6193 FUJIKIN MFC FCS FCS-4WS-798-F500#D
17955 KALREZ BONDING SLIT VALVE DOOR PLATE K603610-9100
5313 SMC E/P REGULATOR ASSY W/SENSOR TECHNICS SQ01566/SQ01567 ITV2011-31N3N4-X95
9668 PATLITE TOWER LAMP ASSY, LME-TW RHB-24AUL
6100 FUJIKIN MFC P7000 WR FCSP7002W-4WS1-F122B-A3
13178 ORIENTAL MOTOR BRUSHLESS DC MOTOR DRIVER BMUD30-C
3492 NSK ESA SERVO DRIVER ESA-Y2020T23-21
9242 BIMBA ROTARY ACTUATOR CYLINDER 150 MAX PRESSURE PT-037090
8944 MYKROLIS IMPACT 2 V2 MG-PC 0.5 um OF S4418M004Y09
16669 APPLIED MATERIALS WEIGHT 8 CLAMP RING 9.697BC M4 SCREWS 0020-29359
23052 ORIENTAL MOTOR SPEED CONTROLLER MSP101
18553 SONY VIDEO GRAPHIC PRINTER UP-897MD
14490 BOC EDWARDS OIL BOX PRINTED GASKET FOR RV SERIES A27160005
11708 CKD AIR OPERATED VALVE AMD312-8US-6-0-4
9512 SCHNEIDER ELECTRIC TELEMECANIQUE LEXIUM 05 LXM05BD14N4
9709 APPLIED MATERIALS 17" TOUCHSCREEN 0242-46557 BPC-1701-01-01-LPE-KIT-MON-MON
1656 MITSUBISHI GRAPHIC OPERATION TERMINAL A851GOT-LWD-M3
5481 APPLIED MATERIALS FRONT PANEL FRAME 0030-70085
16314 GRANVILLE-PHILLIPS 275 MINI-CONVECTRON 275945
18658 APPLIED MATERIALS FILTER ASSY 0041-50424
18659 APPLIED MATERIALS FILTER ASSY 0190-63395
19690 OEM CLAMPING RING INSPECTION GLASS 102200828
14178 APPLIED MATERIALS CONTROLLER. A/C WINDOW 0090-00045
16109 APPLIED MATERIALS PLATE HEATER LIFT LEVELING PRODUCER 0040-38031
16760 APPLIED MATERIALS CONTROLLER INTERCONNECT, (EMC COMPLIANT) 0150-21337
18318 APPLIED MATERIALS COVER TOP QUARTZ 8" PCII 0200-00218
18774 APPLIED MATERIALS OPAL SCAN CURRENT AMP. ASSY 70512553100
8256 APPLIED MATERIALS RING WAFER LIFT 200MM 0020-10192
1051 NOVELLUS SHIELD, BOTTOM BACK, GRIT BLAST 17-291212-00
16973 APPLIED MATERIALS WELDMENT VLV MANF 5 STATION 0010-34050
19231 MELLES GRIOT LASER HEAD 05-LHP-121-490
4930 TYLAN GENERAL THROTTLE VALVE WITH VEXTA STEPPING MOTOR PH265-02 MDVX-020
3891 VAT GATE VALVE 02109-BA24-ATU1
3501 NSK ESA SERVO DRIVER ESA-Y2020A23-11
16161 APPLIED MATERIALS BRG BALL 7/8OD x 3/8ID x 7/32W 0190-75039
18695 ORIENTAL MOTOR PCB, 5-PHASE DRIVER, EB2277-2G, EB2277-3G A4509-048
20121 EDWARDS ISO 160 TRAPPED C/RING VITON B27158172
20161 NOVELLUS SPACER, ANODE CHAMBER, 300MM 15-126061-07
20185 ATMI PCB, UNIVERSAL ALARM BOARD-15CH 142-24-003
20839 VEXTA PCB, STEPPER MOTOR DRIVER BOARD EB4048-5S
20952 APPLIED MATERIALS CABLE ASSY 0140-80295
21115 APPLIED MATERIALS CABLE ASSY, 1M, 0150-10063 0140-25906
497 DELTA ELECTRONIKA POWER SUPPLY ST150
13707 HAMILTON PSD/2 SYRINGE PUMP HVX DRIVE LU0960 ECI QLC-5100 162573
14537 AZCO OZONE GENERATOR VMUS-4
10948 SAMSUNG FARA T02 ROBOCON TEACHING PENDANT SRCP-OTP1B
22177 FLUID METERING FMI Q PUMP, V06231AC11 (REFURBISHED) QG50/QG50MB
16769 APPLIED MATERIALS ASSY CABLE HEAT EXCHGR INTRFC, 25FT 0150-09027
16419 APPLIED MATERIALS CABLE ASSEMBLYPUMP EMO UMBILICAL, 75FT 0150-08845
16796 APPLIED MATERIALS CABLE ASSY 2-PHS DRVR OUT MTR 0150-20580
16824 HP PCB, MODEL 10 STORAGE PROCESSOR-SP, 005042860 A3231-60003
19064 PITTMAN DC SERVO MOTOR W ENCODER HEDS-5310 14205C864
13641 APPLIED MATERIALS CABLE ASSY POWER CORD EXT, 4FT 0150-12779
16336 APPLIED MATERIALS HEATED EXTENDED BELL INTLK LI-9496 BALZERS 0190-29859
10642 MATTSON RF SOURCE CABLE, 1.8M 3003079
16195 APPLIED MATERIALS PLATE TOP PLATFORM ENP WBLL CMF CENTURA 0020-75994
14223 KOFLOC MASS FLOW SENSOR, GAS N2 3810S
23255 MAC SOLENOID 10.8 VALVE, 2 WAY N-7557-022
8253 HATSUTA CABINEX-EWT AUTOMATIC FIRE SUPPRESSION SYS MANUAL RELEASE EUEWM-129
6162 UNIT MFC MULTI FLO 8560 SERIES UFC-8565C
8616 NOVELLUS ELECTROSTATIC CHUCK, ESC 200MM HDP MC TYPE 02-121642-00
5926 KOKUSAI ELECTRIC ALPHA 4-WAVE ULTRASONIC GENERATOR U0600FXI-P
9729 MKS 600 SERIES PRESSURE CONTROLLER 651C-26831
2019 ASTEX TUBE PLASMA SOURCE SAPPHIRE 1/4VCR, AMAT 3750-01112 FI20101
21180 LEYBOLD TURBO MOLECULAR PUMP P/N 85536 250
4872 LAM RESEARCH WAFER DETECTOR 853-052482-001-C-MDFT
注：聯(lián)系我時(shí)，請說是在“傲立機(jī)床網(wǎng)”上看到的，謝謝！
